Please refer to the respective ILIAS course for the specific dates.

Aims

The aim of the lecture is to familiarize the listener with terms and procedures from the various areas of microtechnologies and system technologies. The system-oriented electrical engineer plays a central mediating role between technologists and computer scientists. The student should therefore acquire the ability to communicate with experts from a wide range of technical disciplines.

Contents

First, the term microsystems technology is defined and discussed in connection with related topics. The most important microstructure technologies are then presented. An introduction to vertical and lateral microstructure techniques using thin-film and microlithographic methods is given. The most important dry and wet etching methods for microoptical and micromechanical applications are presented and discussed. The different classes of micro-optical components are explained. These include refractive and diffractive optical components as well as active and passive waveguides in integrated optical systems and fibers. Micromechanical manufacturing processes in silicon and plastic using the LIGA process are illustrated using examples of conventional microsystems.